The low operational voltage and high sensitivity of this device can be partially attributed to a pre-biasing condition on the membrane. A 12 V AC signal superimposed on a 10 V DC signal was used on the transmission side, and only a bias-tee, with no amplifiers, was used on the receiving side. The first ultrasound B-mode image of a wire phantom created with a 64-element linear array using synthetic aperture beamforming techniques is presented. Herein, a new fabrication process is described for polymer-based CMUTs (pol圜MUTs) using the photopolymer SU-8 and Omnicoat. For widespread use of CMUTs, a much lower fabrication cost that uses inexpensive materials, which maintain or improve upon existing sensitivity, is needed. Manufacturing cost and sensitivity are limiting factors in current CMUTs that depend on the fabrication equipment and, especially, on the materials used. CMUTs have a sealed cavity between a fixed electrode and a suspended metalized membrane. As an emerging alternative, capacitive micromachined ultrasound transducers (CMUTs) offer wider bandwidth, better integration with electronics, and ease of fabricating large arrays. The ultrasonic transducer industry is dominated by piezoelectric materials.
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